Type

Printing line

Line products Solder mask products Laser drilling machine

Pan-semiconductor

Direct Imaging lithography Projection lithography AOI detection

Screen printing

CTS Series

Photovoltaic cells

Core components

DLP optical machine (optical engine) UV-LD/LED light source High-precision optical lens High-precision optical system customization

Maximum substrate: 630×730mm

Analysis L/S: 6/6μm

alignment: ±3.5µm

Capaion capacity: 1.4 pieces/minute@90mj

Maximum substrate: 630×730mm

Analysis L/S: 8/8μm

alignment: ±5µm

Capaion capacity: 3 sides/minute@90mj

(single exposure length 1200mm,

can be stitched and exposed multiple times)

width: 250/520mm

Analysis L/S: 25/25μm

alignment: ±10µm

Capaion capacity: 5m/minute@50mj

width: 250/520mm

Analysis L/S: 12/12μm

alignment: ±6µm

Capaion capacity: 1.3m/minute@50mj

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