Product advantages
high-resolution optical lens improves line quality
to achieve high-resolution 6/6μm on dry film
Product advantages
high-resolution optical lens improves line quality
to achieve high-resolution 6/6μm on dry film
Product advantages
precision rail platform achieves ±5um alignment accuracy
advanced air flotation platform technology
Product advantages
automatic optical focus integration technology
overcome uneven plate thickness
Product advantages
independent mirror double table alternating alignment exposure technology
AF measurement and partition alignment opening capacity without loss
Product features | single-table standard model |
Maximum substrate size | 630mm×730mm |
Minimum substrate size | 300mm×300mm |
Substrate thickness | 0.05mm~3mm |
Process analysis L/S | 8µm/8µm |
Line width accuracy | ±10% |
Depth of field | ±75µm |
Interlayer accuracy | 10µm |
Outer alignment accuracy | ±5µm |
Exposure time (90mj/cm² four-point position per piece, excluding upper and lower plates) | 18 seconds/face @623mm×410mm |
Production efficiency (90mj/cm² four points per piece) | 3 sides/minute @623mm×410mm |
Light source power | 6W |
Number of single-machine countertops | single countertops |
Inner circuit module | common to the inner and outer layers |
Weight of stand-alone equipment | 5500kg |
Single-machine size | 2940mm×1700mm×2195mm |
Automatic wire external dimensions | 6380mm×3082mm×2455mm (excluding plate receivation machine) |
Working height (transmission height) | 890±20mm |