DPM-06

Product advantages

high-resolution optical lens improves line quality
to achieve high-resolution 6/6μm on dry film

Product advantages

precision rail platform achieves ±5um alignment accuracy
advanced air flotation platform technology

Product advantages

automatic optical focus integration technology
overcome uneven plate thickness

Product advantages

independent mirror double table alternating alignment exposure technology
AF measurement and partition alignment opening capacity without loss

EQUIPMENT PARAMETERS
Product features high-precision mirror air flotation platform
Maximum substrate size 630mm×730mm
Minimum substrate size 300mm×300mm
Substrate thickness 0.05mm~3mm
Process analysis L/S 6µm/6µm
Line width accuracy ±10%
Depth of field ±200µm (with AF module)
Interlayer opposition accuracy 7µm
Outer alignment accuracy ±3.5µm
Exposure time (90mj/cm² four-point position per piece, excluding upper and lower plates) 42 seconds/piece @623mm×610mm
Production efficiency (90mj/cm² four-point position per piece) 1.4 pieces/minute @623mmX610mm
Light source power 6W
Number of stand-alone countertops left and right interactive air flotation double countertops
Inner circuit module optional
Weight of stand-alone equipment 16000kg (including automatic line)
Stand-alone external dimensions n/a
Automatic wire size 6620mm X3220mm X2400mm (excluding the receiving and dissipation machine)
Working height (transmission height) 1000±20mm
设备参数

产品特色

高精度镜像气浮平台

最大基板尺寸

630mm×730mm

最小基板尺寸

300mm×300mm

基板厚度

0.05mm~3mm

工艺解析(L/S)

6μm/6μm

线宽精度

±10%

景深

±200μm(带AF模组)

层间对位精准度

7μm

外层对位准精度

±3.5μm

曝光时间(90mj/cm2&每片四点对位,不含上下板) 

42秒/片@623mm×610mm

生产效率(50mj/cm2&每片四点对位) 

1.4片/分钟@623mm×610mm

光源功率

6W

单机台面数量

左右交互气浮双台面

内层线路模组

选配

单机设备重量

16000kg(含自动线)

单机外形尺寸

n/a

自动线外形尺寸

6620mm×3220mm×2400mm(不含收放板机)

工作高度(输送高度)

1000±20mm