Product advantages
high-resolution optical lens improves line quality
to achieve high-resolution 6/6μm on dry film
Product advantages
high-resolution optical lens improves line quality
to achieve high-resolution 6/6μm on dry film
Product advantages
precision rail platform achieves ±5um alignment accuracy
advanced air flotation platform technology
Product advantages
automatic optical focus integration technology
overcome uneven plate thickness
Product advantages
independent mirror double table alternating alignment exposure technology
AF measurement and partition alignment opening capacity without loss
Product features | high-precision mirror air flotation platform |
Maximum substrate size | 630mm×730mm |
Minimum substrate size | 300mm×300mm |
Substrate thickness | 0.05mm~3mm |
Process analysis L/S | 6µm/6µm |
Line width accuracy | ±10% |
Depth of field | ±200µm (with AF module) |
Interlayer opposition accuracy | 7µm |
Outer alignment accuracy | ±3.5µm |
Exposure time (90mj/cm² four-point position per piece, excluding upper and lower plates) | 42 seconds/piece @623mm×610mm |
Production efficiency (90mj/cm² four-point position per piece) | 1.4 pieces/minute @623mmX610mm |
Light source power | 6W |
Number of stand-alone countertops | left and right interactive air flotation double countertops |
Inner circuit module | optional |
Weight of stand-alone equipment | 16000kg (including automatic line) |
Stand-alone external dimensions | n/a |
Automatic wire size | 6620mm X3220mm X2400mm (excluding the receiving and dissipation machine) |
Working height (transmission height) | 1000±20mm |