TSM-10L

Product advantages

100% independent research and development for photovoltaic mass production and application

Product advantages

compatible with 210mm

Product advantages

high-precision optical system

Product advantages

high-precision platform and motion control technology achieve
high-precision and high-reliability graphics requirements

EQUIPMENT PARAMETERS
Product features selection of the best graphics technology and fine creation
Maximum substrate size 210mmx105mm
Compatible substrate size 182mmx91mm
Substrate thickness 0.05mm-1mm
Mass production analysis 15µm/15µm
Line width accuracy ±10%
Depth of field ±200µm
Counterpoint accuracy edge-finding ±50µm
Production efficiency

设备参数

产品特色

甄选最佳图形化技术、精细打造

最大基板尺寸

210mm×105mm

兼容基板尺寸

182mm×91mm

基板厚度

0.05mm~1mm

量产解析(L/S)

15μm/15μm

线宽精度

±10%

景深

±200μm

对位精准度

寻边对位±50μm

生产效率

0.5s/pcs&70mj/cm2&210mmx 105mm  连线:7200片/h