DPS-08

Product advantages

high-resolution optical lens improves line quality
to achieve high-resolution 6/6μm on dry film

Product advantages

precision rail platform achieves ±5um alignment accuracy
advanced air flotation platform technology

Product advantages

automatic optical focus integration technology
overcome uneven plate thickness

Product advantages

independent mirror double table alternating alignment exposure technology
AF measurement and partition alignment opening capacity without loss

EQUIPMENT PARAMETERS
Product features single-table standard model
Maximum substrate size 630mm×730mm
Minimum substrate size 300mm×300mm
Substrate thickness 0.05mm~3mm
Process analysis L/S 8µm/8µm
Line width accuracy ±10%
Depth of field ±75µm
Interlayer accuracy 10µm
Outer alignment accuracy ±5µm
Exposure time (90mj/cm² four-point position per piece, excluding upper and lower plates) 18 seconds/face @623mm×410mm
Production efficiency (90mj/cm² four points per piece) 3 sides/minute @623mm×410mm
Light source power 6W
Number of single-machine countertops single countertops
Inner circuit module common to the inner and outer layers
Weight of stand-alone equipment 5500kg
Single-machine size 2940mm×1700mm×2195mm
Automatic wire external dimensions 6380mm×3082mm×2455mm (excluding plate receivation machine)
Working height (transmission height) 890±20mm
设备参数

产品特色

单台面标准机型

最大基板尺寸

630mm×730mm

最小基板尺寸

300mm×300mm

基板厚度

0.05mm~3mm

工艺解析(L/S)

8μm/8μm

线宽精度

±10%

景深

±75μm

层间对位精准度

10μm

外层对位准精度

±5μm

曝光时间(90mj/cm2&每片四点对位,不含上下板)

18秒/面@623mm×410mm

生产效率(90mj/cm2&每片四点对位)

3面/分钟 @623mm×410mm

光源功率

6W

单机台面数量

单台面

内层线路模组

内外层通用

单机设备重量

5500kg

单机外形尺寸

2940mm×1700mm×2195mm

自动线外形尺寸

6380mm×3082mm×2455mm(不含收放板机)

工作高度(输送高度)

890±20mm