Product advantages
product iteration update
with a total installed capacity of more than 700 units
Product advantages
100% self-produced subsystem module
has been verified by the large-scale market
mature and reliable
Product advantages
upper and lower countertop interaction
| Product features | two-table high-efficiency |
| Maximum substrate size | 630mm×730mm (effective exposure size 623mm×730mm) |
| Minimum substrate size | 250mm×250mm (single machine), 300mm×300mm (automatic line) |
| Substrate thickness | 0.05mm~5mm (single machine), 0.1mm~3.5mm (automatic line) |
| Process analysis L/S | 35µm/35µm |
| Line width accuracy | ±10% |
| Depth of field | ±300µm |
| Interlayer opposition accuracy | 20µm |
| Outer alignment accuracy | ±10µm |
| Exposure time (623mm×680mm & four-point opposite position, excluding upper and lower plates) | 8 seconds/face @50mj/cm² |
| Production efficiency (623mm×680mm & four-point opposition) | 7.5 face/minute @50mj/cm² |
| Light source power | 48W |
| Number of stand-alone countertops | upper and lower interactive double countertops |
| Inner circuit module | common to the inner and outer layers |
| Weight of stand-alone equipment | 5000kg |
| Stand-alone external dimensions | 3150mm×1700mm×1950mm |
| Automatic wire size | 6380mm×3460mm×2455mm (excluding plate receiver machine) |
| Working height (transmission height) | 1030±20mm |
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