Product advantages
support compatible with different sizes of battery cell alignment exposure
such as: 158/166/182/210 whole piece and half piece
Product advantages
support compatible with different sizes of battery cell alignment exposure
such as: 158/166/182/210 whole piece and half piece
Product advantages
ultra-high precision
line width analysis 3um/3um
Product advantages
support Mark positioning and edge-finding positioning
Product advantages
R&D sharp tool
helps challenge the world record
Product features | single machine fully automatic, split exposure |
Maximum substrate size | 220mmx220mm |
Minimum substrate size | 156mmx156mm (including half piece) |
Substrate thickness | 0-1mm |
Limit analysis (L/S) | 3µm/3µm |
Line width accuracy | ±0.6µm |
Depth of field | ±15µm |
Counterpoint accuracy | edge-finding position ±40µm, Mark point position ±3µm |
Production efficiency | 45pcs/h&70mj/cm² (210mmx105mm) |