DSS-03

Product advantages

support compatible with different sizes of battery cell alignment exposure
such as: 158/166/182/210 whole piece and half piece

Product advantages

ultra-high precision
line width analysis 3um/3um

Product advantages

support Mark positioning and edge-finding positioning

Product advantages

R&D sharp tool
helps challenge the world record

EQUIPMENT PARAMETERS
Product features single machine fully automatic, split exposure
Maximum substrate size 220mmx220mm
Minimum substrate size 156mmx156mm (including half piece)
Substrate thickness 0-1mm
Limit analysis (L/S) 3µm/3µm
Line width accuracy ±0.6µm
Depth of field ±15µm
Counterpoint accuracy edge-finding position ±40µm, Mark point position ±3µm
Production efficiency 45pcs/h&70mj/cm² (210mmx105mm)
设备参数

产品特色

单机全自动,分割曝光

最大基板尺寸

220mm×220mm

最小基板尺寸

156mm×156mm(含半片)

基板厚度

0mm~1mm

极限解析(L/S)

3μm/3μm

线宽精度

±0.6μm

景深

±15μm

对位精准度

寻边对位±40μm,Mark点对位±3μm

生产效率

45pcs/h&70mj/cm2(210×105mm)