Product advantage
High resolution optical lens improves line quality
Product advantage
Advanced air float platform technology
Product advantage
Automatic optical focusing integration technology to overcome the uneven thickness of the board.
Product advantage
Single table standard model
| Maximum substrate size | 610mm×630mm (24"× 24") |
| Minimum substrate size | 300mm×300mm (12"× 12") |
| Substrate thickness | 0.1mm~5.0mm |
| Analyze | 4μm/4μm |
| Resolution | 200nm |
| Linewidth accuracy | ±0.4μm |
| Depth of focus | ±200μm (AutoFocus) |
| Alignment accuracy | ±2μm@610mm×630mm |
| Capacity | <42s/pcs @ 610mm×630mm & 100mj/cm²&Each piece of four-point counterpoint X |
| Imaging material | photoresistance or high sensitivity dry film |
| Light source spectrum | 405±5nm |
| Exposure energy | 10-1000mj/cm² or higher |
| Application | hard board, soft board, soft and hard combined board,Wafer |
| Data entry | Gerber274X, Gerber274D, DXF |
| Single power supply | AC380V-50HZ-15KW(main equipment) three-phase five wire |
| Overall dimension（L×W×H） | (Drum line)6500×1000×1500 ,DI equipment)3500×1745×2050,(Feed/discharge port + mechanical arm) 1000×1745×2050 |
| Room temperature/humidity | 22℃±2℃， 40%-60%（non-condensation） |
| Basic growth and contraction management | fixed growth and contraction, automatic growth and contraction, segment growth and contraction |
| StampFunctions | date, time, serial number, expansion and contraction coefficient, etc. |
| Data entry | ODB++ |
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